Micromachined free-space integrated micro-optics
- 1 August 1995
- journal article
- conference paper
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 50 (1-2) , 127-134
- https://doi.org/10.1016/0924-4247(96)80096-3
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- Micromachined three-dimensional tunable Fabry-Perot etalonsPublished by SPIE-Intl Soc Optical Eng ,1995
- Micro-machined three-dimensional micro-optics for integrated free-space optical systemIEEE Photonics Technology Letters, 1994
- Micro-opto-electro-mechanical systemsOptical Engineering, 1994
- Three-dimensional micro-Fresnel opticalelements fabricated by micromachining techniqueElectronics Letters, 1994
- Microfabricated optical chopperPublished by SPIE-Intl Soc Optical Eng ,1993
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- Deformable grating optical modulatorOptics Letters, 1992
- Deformable-Mirror Spatial Light ModulatorsPublished by SPIE-Intl Soc Optical Eng ,1990
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Silicon Torsional Scanning MirrorIBM Journal of Research and Development, 1980