New application for multipolar plasmas: High-temperature treatment of materials
- 1 October 1984
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 55 (10) , 1636-1638
- https://doi.org/10.1063/1.1137631
Abstract
In a multipole plasma reactor, large volumes of homogeneous steady‐state plasma of satisfactory density can be obtained. This type of plasma appears to be well adapted to high‐temperature treatment of materials. The mechanisms involved, advantages, and limitations of the process are analyzed in the light of some preliminary results.Keywords
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