Measurements of particle size kinetics from nanometer to micrometer scale in a low-pressure argon-silane radio-frequency discharge
- 13 January 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 60 (2) , 169-171
- https://doi.org/10.1063/1.106981
Abstract
The time evolution of the size of particles produced in a silane‐argon low‐pressure radio‐frequency discharge has been determined in the nanometer to the micrometer range using transmission electron microscopy. Highly ‘‘monodisperse’’ distributions are observed and their temporal evolution is followed. These studies are combined with laser light scattering measurements to obtain particle densities, which are of the order of 107 cm−3. For short plasma durations (Δt<5 s), a fast (10 nm/s) linear increase in diameter is measured.Keywords
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