Particle-plasma interactions in low-pressure discharges
- 12 November 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (20) , 2077-2079
- https://doi.org/10.1063/1.103946
Abstract
Spatial profiles of size and number density of aluminum particles in argon plasmas have been measured. Angular dissymmetry laser light scattering indicates that larger particles tend to segregate towards the anodic plasma‐sheath boundary; however, the larger particles (≳400 nm diameter) near this boundary are present in number densities lower than those closer to the center of the discharge, where particles are smaller (∼300 nm). Nonspherical particle aggregates appear to form near the plasma‐sheath interface under some conditions. Optical emission intensity and positive ion number density are reduced in discharges with particles as compared to discharges without particles.Keywords
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