Small angle x-ray scattering for sub-100 nm pattern characterization
- 10 November 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 83 (19) , 4059-4061
- https://doi.org/10.1063/1.1622793
Abstract
Characterization of sub-100 nm photolithographic patterns with nanometer scale resolution is demonstrated using small angle x-ray scattering. The transmission scattering geometry employed potentially enables high throughput measurements for future technology nodes of the semiconductor industry, organic and inorganic nanoscale devices, and three-dimensional structures. The method is demonstrated through the characterization of a series of polymer photoresist gratings using a synchrotron x-ray source. Quantities, such as periodicity and line width, are extracted using minimal modeling. Additional quantities and the potential of a laboratory-based x-ray system are briefly discussed.Keywords
This publication has 11 references indexed in Scilit:
- Structural characterizaton of deep-submicron lithographic structures using small-angle neutron scatteringPublished by SPIE-Intl Soc Optical Eng ,2002
- High-resolution x-ray diffraction from self-organized PbSe/PbEuTe quantum dot superlatticesJournal of Physics D: Applied Physics, 2001
- Comparison of metrology methods for quantifying the line edge roughness of patterned featuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Intercomparison of SEM, AFM, and electrical linewidthsPublished by SPIE-Intl Soc Optical Eng ,1999
- Grazing incidence diffraction by epitaxial multilayered gratingsPhysica B: Condensed Matter, 1998
- Multiparameter grating metrology using optical scatterometryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- X-ray diffraction from laterally structured surfaces: Total external reflectionPhysical Review B, 1995
- X-ray diffraction from a coherently illuminated Si(001) grating surfacePhysical Review B, 1993
- High resolution x-ray diffraction of periodic surface gratingsApplied Physics Letters, 1993
- X-ray diffraction reciprocal space mapping of a GaAs surface gratingApplied Physics Letters, 1993