Impact-energy dependence of atomic mixing and selective sputtering of light impurities in cesium-bombarded silicon
- 1 May 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 209-210, 191-195
- https://doi.org/10.1016/0167-5087(83)90799-8
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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