Investigation of stability and reliability of tin oxide thin-film for integrated micro-machined gas sensor devices
- 27 November 2001
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 81 (1) , 9-16
- https://doi.org/10.1016/s0925-4005(01)00920-0
Abstract
No abstract availableKeywords
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