The link between nanoscale feature development in a negative resist and the Hansen solubility sphere
- 23 September 2009
- journal article
- research article
- Published by Wiley in Journal of Polymer Science Part B: Polymer Physics
- Vol. 47 (21) , 2091-2105
- https://doi.org/10.1002/polb.21806
Abstract
No abstract availableKeywords
Funding Information
- Director, Office of Science, Office of Basic Energy Sciences, Materials Sciences and Engineering Division, of the U.S. Department of Energy (DE-AC02-05CH11231)
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