Self-diffusion of silicon in polycrystallinePd2Si in the absence of growth
- 15 December 1989
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 40 (17) , 11670-11675
- https://doi.org/10.1103/physrevb.40.11670
Abstract
The self-diffusion of silicon in polycrystalline Si has been investigated with the aid of radioactive over the temperature range 350–550 °C. The results show that silicon self-diffusion occurs by a combination of rapid grain-boundary diffusion and slower lattice diffusion. A model has been adopted that can reproduce the observed concentration profiles over the above-mentioned range. The coefficient for grain-boundary diffusion is found to be at least times larger than that for lattice diffusion. The grain boundaries thus effectively act as instantaneous sources, and the overall silicon self-diffusion is controlled by bulk lattice diffusion. Using the adopted model, the activation energy for bulk lattice diffusion has been determined to be 0.8±0.1 eV.
Keywords
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