Correlations between interfacial oxides and resistance changes for W contacts on heavily doped Si-Ge
- 1 June 1975
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 27 (2) , 263-271
- https://doi.org/10.1016/0040-6090(75)90033-4
Abstract
No abstract availableKeywords
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