Sensorless manipulation using massively parallel microfabricated actuator arrays
- 17 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 826-833 vol.1
- https://doi.org/10.1109/robot.1994.351386
Abstract
This paper investigates manipulation tasks with arrays of microelectromechanical structures (MEMS). We develop a geometric model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe efficient algorithms for their evaluation. The theory of limit surfaces offers a purely geometric characterization of microscale contacts between actuator and moving object, which can be used to efficiently predict the motion of the object on an actuator array. It is shown how simple actuator control strategies can be used to uniquely align a part up to symmetry without sensor feedback. This theory is applicable to a wide range of microactuator arrays. Our actuators are oscillating structures of single-crystal silicon fabricated in a IC-compatible process. Calculations show that these actuators are strong enough to levitate and move, for example, a piece of paper.Keywords
This publication has 15 references indexed in Scilit:
- A proposal for a conveyance system with autonomous decentralized micro modulesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Single-crystal silicon torsional resonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A theory of manipulation and control for microfabricated actuator arraysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Array-driven ultrasonic microactuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A planar air levitated electrostatic actuator systemPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A conveyance system using air flow based on the concept of distributed micro motion systemsJournal of Microelectromechanical Systems, 1994
- Orienting polygonal parts without sensorsAlgorithmica, 1993
- Automatic Grasp Planning in the Presence of UncertaintyThe International Journal of Robotics Research, 1988
- An exploration of sensorless manipulationIEEE Journal on Robotics and Automation, 1988
- Planning robotic manipulation strategies for workpieces that slideIEEE Journal on Robotics and Automation, 1988