Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films
- 1 July 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 91 (3) , 373-380
- https://doi.org/10.1016/s0924-4247(01)00610-0
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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