Effective Production of Negative Ions around Magnetized CF4 Plasma Column
- 1 August 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (8B) , L1123
- https://doi.org/10.1143/jjap.36.l1123
Abstract
Mass distributions of negative and positive ions in a magnetized CF4 plasma column are simultaneously measured using the newly developed ion cyclotron resonance mass spectrometer. Strong accumulation of F- ions around the reactive plasma column is obtained using a mass spectrometer and the Langmuir probe method, which enables radial plasma confinement by the magnetic field to obtain suitable condition for producing and maintaining negative ions. Using this spectrometer, spectra of positive and negative ions are simultaneously and separately measured.Keywords
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