3D thermal wave scattering on buried inhomogeneities in ac thermal microscopy
- 7 October 1998
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 31 (19) , 2377-2387
- https://doi.org/10.1088/0022-3727/31/19/004
Abstract
The scattering of the thermal waves on buried small thermal resistances is theoretically studied in the framework of conductive thermal modelling of the coupling between a SThM probe and a sample. Lateral resolutions for the amplitude and phase of the probe's ac thermal response are obtained. The modelling, using an iterative method, goes beyond the usual first Born approximation results. Technically, the ac temperature field in the entire geometry is expressed in terms of two-dimensional plane wave spectra which permit direct use of fast Fourier transform algorithms. The various analytical results are easily obtained via a multilayer treatment of the probe and of the sample.Keywords
This publication has 22 references indexed in Scilit:
- Sensor nanofabrication, performance, and conduction mechanisms in scanning thermal microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Thermal imaging of thin films by scanning thermal microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Scanning thermal microscopy: Subsurface imaging, thermal mapping of polymer blends, and localized calorimetryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Sub-surface imaging by scanning thermal microscopyMeasurement Science and Technology, 1996
- Thermal imaging by atomic force microscopy using thermocouple cantilever probesReview of Scientific Instruments, 1995
- Heat transfer between two metallic surfaces at small distancesJournal of Applied Physics, 1994
- Contribution de la mesure de température par micro-sonde thermoélectrique a la microscopie thermiqueJournal de Physique III, 1994
- Scanning probe microscopy of thermal conductivity and subsurface propertiesApplied Physics Letters, 1992
- Scanning thermal profilerApplied Physics Letters, 1986
- Theory of Radiative Heat Transfer between Closely Spaced BodiesPhysical Review B, 1971