Thin-film microstrip lines for MM and sub-MM/wave on-chip interconnects

22 November 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

Vol. 2 (0149645X) , 421-424
https://doi.org/10.1109/mwsym.1997.602823

Abstract

Thin-film microstrip lines with a polymer dielectric between ground and signal conductor are proven to be an attractive alternative to coplanar waveguides for (sub)-MM-wave interconnects. Both simulation and electrooptic characterization reveal negligible modal dispersion up to 1000 GHz and low attenuation even if the lines are realized on low-resistivity substrates.

Keywords

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