Theoretical studies on the growth mechanisms of silicon thin films by atomic layer epitaxy
- 1 October 1989
- journal article
- Published by Elsevier in Surface Science
- Vol. 220 (1) , 137-151
- https://doi.org/10.1016/0039-6028(89)90468-8
Abstract
No abstract availableThis publication has 35 references indexed in Scilit:
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