Measurements of Parameters of Two-Electron-Temperature Plasma Produced by Electron Cyclotron Resonance
- 1 April 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (4A) , L541-543
- https://doi.org/10.1143/jjap.33.l541
Abstract
Langmuir probe measurements were carried out for two-electron-temperature plasmas (T eb and T et; bi-Maxwellian) produced by electron cyclotron resonance (ECR). The tail electron temperatures were observed not only in the ECR region but also in the downstream region. The tail temperatures (T et; 9.6∼24.0 eV) in the downstream region were higher than those ( 7.6∼12.3 eV) in the ECR region, whereas the tail densities (N et; ∼109 cm-3) in the downstream region were one order of magnitude lower than those ( ∼1010 cm-3) in the ECR region.Keywords
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