Freely suspended nanocomposite membranes as highly sensitive sensors
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- 26 September 2004
- journal article
- Published by Springer Nature in Nature Materials
- Vol. 3 (10) , 721-728
- https://doi.org/10.1038/nmat1212
Abstract
Highly sensitive sensor arrays are in high demand for prospective applications in remote sensing and imaging. Measuring microscopic deflections of compliant micromembranes and cantilevers is developing into one of the most versatile approaches for thermal, acoustic and chemical sensing. Here, we report on an innovative fabrication of compliant nanocomposite membranes with nanoscale thickness showing extraordinary sensitivity and dynamic range, which makes them candidates for a new generation of membrane-based sensor arrays. These nanomembranes with a thickness of 25-70 nm, which can be freely suspended over large (hundred micrometres) openings are fabricated with molecular precision by time-efficient, spin-assisted layer-by-layer assembly. They are designed as multilayered molecular composites made of a combination of polymeric monolayers and a metal nanoparticle intralayer. We demonstrate that these nanocomposite membranes possess unparalleled sensitivity and a unique autorecovering ability. The membrane nanostructure that is responsible for these outstanding properties combines multilayered polymer/nanoparticle organization, high polymer-chain orientation, and a pre-stretched state.Keywords
This publication has 44 references indexed in Scilit:
- X-Ray Scattering from Freestanding Polymer Films with Geometrically Curved SurfacesPhysical Review Letters, 2003
- Thermal Photodetector Using Freely Suspended Liquid-Crystal FilmJapanese Journal of Applied Physics, 2003
- Infrared detectors: status and trendsProgress in Quantum Electronics, 2003
- PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membraneSensors and Actuators A: Physical, 2002
- Structuring of membrane sensors using sacrificial porous siliconSensors and Actuators A: Physical, 2000
- Protein insertion within a biological freestanding filmPhysica B: Condensed Matter, 2000
- Elastomeric Suspended Membranes Generated via Langmuir−Blodgett TransferLangmuir, 1998
- Miniaturized infrared sensor using silicon diaphragm based on Golay cellSensors and Actuators A: Physical, 1998
- Polycrystalline diamond pressure microsensorDiamond and Related Materials, 1996
- An infrared pneumatic detector made by micromachining technologyJournal of Micromechanics and Microengineering, 1995