Kinetics and reconstruction of steps at the Si(001) surface
- 28 March 1988
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 60 (13) , 1326-1329
- https://doi.org/10.1103/physrevlett.60.1326
Abstract
The stability ranges of monatomic and diatomic steps on the Si(001) surface are determined by high-resolution spot-profile analysis of low-energy diffracted electrons. Diatomic steps are predominantly observed at temperatures below 1200 K. With increasing annealing temperature the steps coagulate and we identify (113) facets stabilized by a (3×1) reconstruction. These facets are stable above 1200 K, and up to 1450 K. Annealing to higher temperatures results in the formation of monatomic steps with a terrace width above the experimental coherence length.Keywords
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