Defect electrical conduction in SIMOX buried oxides
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 40 (9) , 1700-1705
- https://doi.org/10.1109/16.231574
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Hydrogen interactions with SIMOXPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Effect of particles on buried oxide defects in SIMOX materialPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Defect and bulk electrical conduction in SIMOX buried oxidesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Residual defects in SIMOX: threading dislocations and pipesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Comparative study of radiation-induced electrical and spin active defects in buried SiO2 layersJournal of Applied Physics, 1992
- Fowler-Nordheim Tunneling into Thermally Grown SiO2Journal of Applied Physics, 1969