Thermodynamic Calculations for the Chemical Vapor Deposition of Silicon Carbide
- 1 August 1983
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 66 (8) , 558-566
- https://doi.org/10.1111/j.1151-2916.1983.tb10091.x
Abstract
No abstract availableKeywords
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