Proximity X-ray Lithography Using Self-Assembled Alkylsiloxane Films: Resolution and Pattern Transfer
- 8 December 2000
- journal article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 17 (1) , 228-233
- https://doi.org/10.1021/la001176h
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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