Damage formation and annealing of ion implantation in Si
- 30 April 1991
- journal article
- review article
- Published by Elsevier in Materials Science Reports
- Vol. 6 (4-5) , 141-214
- https://doi.org/10.1016/0920-2307(91)90007-a
Abstract
No abstract availableThis publication has 100 references indexed in Scilit:
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