Process effects in ion plating
- 31 December 1990
- Vol. 41 (7-9) , 2196-2200
- https://doi.org/10.1016/0042-207x(90)94223-d
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Metal clusters in ion platingApplied Physics Letters, 1989
- Ion plating processes: Design criteria and system optimizationSurface and Coatings Technology, 1988
- Some fundamental aspects of glow discharges in plasma-assisted processesSurface and Coatings Technology, 1987
- Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle densityJournal of Applied Physics, 1980
- Mechanisms of reactive sputtering of indium I: Growth of InN in mixed Ar-N2 dischargesThin Solid Films, 1980
- Ion Sampling Considerations for a Discharge Plasma of NitrogenJournal of Applied Physics, 1966
- Ionic Adsorption and Dissociation Cross Section for NitrogenThe Journal of Chemical Physics, 1966
- COLLISIONS OF LONG-LIVED EXCITED IONS OF OXYGEN AND NITROGENCanadian Journal of Physics, 1964