Preparation of epitaxial AlN films by electron cyclotron resonance plasma-assisted chemical vapor deposition on Ir- and Pt-coated sapphire substrates
- 14 March 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (11) , 1359-1361
- https://doi.org/10.1063/1.111934
Abstract
No abstract availableKeywords
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