Analysis of stress distribution in semiconductor substrates with film edges
- 1 January 1983
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 18 (11) , 1415-1422
- https://doi.org/10.1002/crat.2170181121
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Stress distributions in silicon crystal substrates with thin filmsJournal of Applied Physics, 1981
- Film-edge-induced stress in substratesJournal of Applied Physics, 1979
- Film-edge-induced stress in silicon substratesApplied Physics Letters, 1978
- A method for finding critical stresses of dislocation movementApplied Physics Letters, 1977