Suppression of etch pit and hillock formation on carbonization of Si substrate and low temperature growth of SiC
- 1 December 1991
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 115 (1-4) , 612-616
- https://doi.org/10.1016/0022-0248(91)90813-k
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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