Ion Beams in Prospect

This publication has 7 references indexed in Scilit:

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  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
• Canal rays to ion implantation: 1886-1986
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• A new approach to ion implanter mass analysis optics
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• Mass-separated negative-ion-beam deposition system
  Review of Scientific Instruments, 1986
• Wafer charging and beam interactions in ion implantation
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• Ion beam studies: Part IV: The use of multiply-charged and polyatomic ions in an implantation accelerator
  Nuclear Instruments and Methods, 1977
• A note on the production of intense beams of negative heavy ions
  Nuclear Instruments and Methods, 1971