Superconformal Electrodeposition of Silver from a KAg(CN)[sub 2]-KCN-KSeCN Electrolyte
- 1 January 2003
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 150 (2) , C61-C66
- https://doi.org/10.1149/1.1531195
Abstract
Electrodeposition of silver from a KAg(CN)2KCNKAg(CN)2KCN electrolyte was investigated. The addition of potassium selenocyanate (KSeCN) results in a hysteretic current-voltage response, specular films, and superconformal growth in submicrometer vias. These observations are well described by the recently proposed curvature enhanced accelerator coverage model of film growth. © 2002 The Electrochemical Society. All rights reserved.Keywords
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