Ultrahigh vacuum scanning force microscope with fiber-optic deflection sensor
- 1 August 1996
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 67 (8) , 2957-2959
- https://doi.org/10.1063/1.1147079
Abstract
We built a scanning force microscope working in ultrahigh vacuum. The lever deflection is measured by a fiber‐optic interferometer. To detect large lever deflections the distance between the fiber end and the cantilever backside is controllable by a piezoelectric device. With this technique force–distance curves can be acquired even over large distances. We implemented a stepper motor with gear reduction system for coarse approach in our microscope. First measurements of thin goldfilmsgrown on mica obtained in situ at 10−8 Pa are presented.Keywords
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