Surface Modification of Niobium (Nb) by Atomic Force Microscope (AFM) Nano-Oxidation Process
- 1 November 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (11B) , L1524
- https://doi.org/10.1143/jjap.35.l1524
Abstract
Nanometer-scale surface modification of niobium (Nb) thin films deposited on SiO2/Si substrates was investigated by means of the atomic force microscope (AFM) nano-oxidation process for the first time. The modified structures were fabricated by applying negative bias voltages to the metal-coated conductive cantilever in air. The size of the modified structures was well controlled by changing the scanning speed of the cantilever and the applied negative bias voltage. By changing the negative bias voltage from 7 V to 20 V, the size of the modified structures was controlled, ranging from 18 nm to 93 nm in width and 0.5 nm to 5 nm in height. Through Auger electron spectroscopy (AES) analysis, it is revealed that the modified structure consists of Nb and a large amount of oxygen (O), suggesting the formation of Nb oxide.Keywords
This publication has 12 references indexed in Scilit:
- Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiOx/Ti systemApplied Physics Letters, 1996
- Nanofabrication of thin chromium film deposited on Si(100) surfaces by tip induced anodization in atomic force microscopyApplied Physics Letters, 1995
- Fabrication of nanometer-scale side-gated silicon field effect transistors with an atomic force microscopeApplied Physics Letters, 1995
- Fabrication of 0.1 μm metal oxide semiconductor field-effect transistors with the atomic force microscopeApplied Physics Letters, 1995
- Application of STM Nanometer-Size Oxidation Process to Planar-Type MIM DiodeJapanese Journal of Applied Physics, 1995
- Control of Current in 2DEG Channel by Oxide Wire Formed Using AFMJapanese Journal of Applied Physics, 1995
- Scanning tunneling microscope tip-induced anodization of titanium: Characterization of the modified surface and application to the metal resist process for nanolithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Nanofabrication of Titanium Surface by Tip-Induced Anodization in Scanning Tunneling MicroscopyJapanese Journal of Applied Physics, 1993
- Pattern generation on semiconductor surfaces by a scanning tunneling microscope operating in airJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in airApplied Physics Letters, 1990