Characterization of semi-insulating GaAs wafers by room-temperature EL2-related photoluminescence
- 12 September 1988
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (11) , 959-961
- https://doi.org/10.1063/1.100081
Abstract
Deep level photoluminescence (PL) associated with the dominant midgap donor EL2 in semi-insulating (SI) GaAs crystals has been observed for the first time at room temperature. A broad emission band with a peak at 0.65 eV was observed always in commercial undoped SI GaAs wafers. The association of the 0.65 eV band with the EL2 level has been verified on the basis of the semiquantitative agreement of the distribution on wafers between the PL intensity and the EL2 absorption. Room-temperature PL spectroscopy can be used as a powerful tool to investigate the nonuniformity of the EL2 distribution on commercial wafers with a high spatial resolution.Keywords
This publication has 13 references indexed in Scilit:
- Mapping of EL2-Related Luminescence on Semi-Insulating GaAs Wafers at Room TemperatureJapanese Journal of Applied Physics, 1988
- Radiative Recombination Mechanism of EL2 Level in GaAsJapanese Journal of Applied Physics, 1987
- Above Band-Gap Excitation Process of the 0.6 eV Luminescence Band in GaAsJapanese Journal of Applied Physics, 1987
- Experimental requirements for quantitative mapping of midgap flaw concentration in semi-insulating GaAs wafers by measurement of near-infrared transmittanceJournal of Applied Physics, 1985
- Photoluminescence excitation of the 0.77-eV emission in undoped semi-insulating GaAsPhysical Review B, 1984
- Observation of Lattice Defects in GaAs and Heat-treated Si Crystals by Infrared Light Scattering TomographyJapanese Journal of Applied Physics, 1983
- Deep photoluminescence band related to oxygen in gallium arsenideApplied Physics Letters, 1982
- Inhomogeneity in Semi-Insulating GaAs Revealed by Scanning Leakage Current MeasurementsJapanese Journal of Applied Physics, 1982
- Characterization of Nonuniformity in Semi-Insulating LEC GaAs by Photoluminescence SpectroscopyJapanese Journal of Applied Physics, 1982
- One‐Dimensional Photoluminescence Distribution in Semi‐Insulating GaAs Grown by CZ and HB MethodsJournal of the Electrochemical Society, 1982