Compliant substrates: A comparative study of the relaxation mechanisms of strained films bonded to high and low viscosity oxides
- 1 July 2000
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 29 (7) , 897-900
- https://doi.org/10.1007/s11664-000-0177-2
Abstract
No abstract availableKeywords
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