Formation de dépôts de nitrure de silicium en couche mince obtenus par réaction chimique dans une décharge R.F. Basse pression
- 1 June 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 35 (2) , 179-194
- https://doi.org/10.1016/0040-6090(76)90255-8
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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