SOME PRINCIPLES FOR UNDERSTANDING SURFACE MODIFICATION OF METALS BY GLOW DISCHARGE PROCESSES
- 1 January 1990
- journal article
- research article
- Published by Taylor & Francis in Materials and Manufacturing Processes
- Vol. 5 (3) , 445-470
- https://doi.org/10.1080/10426919008953265
Abstract
An overview of the new technologies available for surface modification is presented with an emphasis on metals. Basic principles of various processes such as chemical and physical vapor deposition are described and the role of cold plasma in these techniques is outlined. Plasma species and reactions in the plasma are discussed in view of their importance in the coating process. Plasma carburizing, nitriding and bonding are described, as well as other plasma assisted methods for deposition of protective coatings- sputtering, reactive evaporation and ion-plating.Keywords
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