Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide
- 1 October 2002
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 64 (1-4) , 131-142
- https://doi.org/10.1016/s0167-9317(02)00777-3
Abstract
No abstract availableKeywords
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