A study of rapid photothermal annealing on the electrical properties and reliability of tantalum pentoxide
- 1 April 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 46 (4) , 814-816
- https://doi.org/10.1109/16.753723
Abstract
No abstract availableKeywords
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