Ion implantation: A useful tool for semiconductor research
- 1 July 1974
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 4 (2) , 91-104
- https://doi.org/10.1007/bf00884263
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
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- Determination of deep energy levels in Si by MOS techniquesApplied Physics Letters, 1972
- Optical waveguiding in proton-implanted GaAsApplied Physics Letters, 1972
- Ion implantation in semiconductors—Part II: Damage production and annealingProceedings of the IEEE, 1972