A new approach towards low-pressure metalorganic vapor phase epitaxy of (AlGa)As using triethylgallium and dimethylethylaminealane
- 2 December 1994
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 145 (1-4) , 478-484
- https://doi.org/10.1016/0022-0248(94)91095-2
Abstract
No abstract availableKeywords
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