Correlation between the stress and microstructure in bias-sputtered ZrO2-Y2O3 films
- 1 July 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 117 (3) , 201-210
- https://doi.org/10.1016/0040-6090(84)90287-6
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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