Phosphorus diffusion from a spin-on doped glass (SOD) source during rapid thermal annealing
- 31 December 1998
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 1 (3-4) , 231-236
- https://doi.org/10.1016/s1369-8001(98)00045-6
Abstract
No abstract availableKeywords
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