Design, Synthesis, and Characterization of Carbon-Rich Cyclopolymers for 193 nm Microlithography
- 9 October 2001
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 13 (11) , 4136-4146
- https://doi.org/10.1021/cm0104304
Abstract
No abstract availableKeywords
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