Atomic-nitrogen production in a radio-frequency plasma source
- 1 November 1993
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 18 (21) , 1843-1845
- https://doi.org/10.1364/ol.18.001843
Abstract
The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrogen atoms are the plasma species responsible for the successful p-type doping of ZnSe:N and related alloys.Keywords
This publication has 16 references indexed in Scilit:
- Light Emission from Quantum Well Structures Containing ZnS, ZnSe, and Related AlloysJapanese Journal of Applied Physics, 1993
- High-resolution study of stimulated emission from blue-green laser diodesApplied Physics Letters, 1992
- Blue and green diode lasers in ZnSe-based quantum wellsApplied Physics Letters, 1992
- Room temperature blue light emitting p-n diodes from Zn(S,Se)-based multiple quantum well structuresApplied Physics Letters, 1992
- ZnSe based multilayer pn junctions as efficient light emitting diodes for display applicationsApplied Physics Letters, 1992
- Molecular-beam epitaxial growth of p- and n-type ZnSe homoepitaxial layersJournal of Crystal Growth, 1992
- Blue/green pn junction electroluminescence from ZnSe-based multiple quantum-well structuresApplied Physics Letters, 1992
- Blue-green injection laser diodes in (Zn,Cd)Se/ZnSe quantum wellsApplied Physics Letters, 1991
- Blue-green laser diodesApplied Physics Letters, 1991
- p-type ZnSe by nitrogen atom beam doping during molecular beam epitaxial growthApplied Physics Letters, 1990