Monte Carlo simulation of nonspecular x-ray scattering profiles from multilayers

A simple model for calculating nonspecular x-ray scattering (NXRS) profiles from nonideal multilayers is proposed. The model is based on a Monte Carlo method, used to simulate an ‘‘imperfect’’ multilayer structure, and the kinematical theory of scattering. The influence of uncorrelated, laterally correlated, and vertically correlated interface roughness on NXRS profiles of multilayers is analyzed. The presence of different in-plane periodicities and its influence on ω scans and ω-2θ scans is discussed. The simulations show that an interpretation of NXRS profiles cannot be performed for a single ω-2θ or ω scan, but should be based on the analysis of I(ω,2θ) profiles collected over the whole (${\mathit{q}}_{\mathit{x}}$,${\mathit{q}}_{\mathit{z}}$) reciprocal plane. © 1996 The American Physical Society.