DC and RF characteristics of double recessed anddouble pulse doped AlInAs/GaInAs/InP HEMTs

Abstract
The effects of gate recess etch profiles on DC and RF characteristics of passivated, double pulse doped AlInAs/GaInAs/InP HEMTs were investigated. On-wafer characterisation has revealed that double recessed devices have higher breakdown voltage, lower output conductance, input capacitance, and feedback capacitance compared to conventional single recessed devices.