Relationship between substrate bias and microstructure in magnetron-sputtered AlCu films
- 1 November 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 154 (1-2) , 81-89
- https://doi.org/10.1016/0040-6090(87)90354-3
Abstract
No abstract availableKeywords
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