High-performance large-area InGaAs MSM photodetectors with a pseudomorphic InGaP cap layer
- 1 August 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (8) , 914-916
- https://doi.org/10.1109/68.404013
Abstract
We report the fabrication and characteristics of high-performance InGaAs MSM photodetectors with a 300-/spl mu/m/spl times/300-/spl mu/m square and a 300-/spl mu/m-diameter circular detection area. With a pseudomorphic In/sub 0.9/Ga/sub 0.1/P cap layer, the detectors exhibit dark current densities less than 1 pA//spl mu/ on finger spacing. Bandwidth over 1 GHz has been obtained for these large-area detectors. Our results also show that the circular detector exhibits better speed performance as compared to the square one due to its smaller parasitic RC constant.Keywords
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