Electron diffusion lengths in liquid-phase epitaxial p-GaAs:Ge layers determined by electron-beam-induced current method

Abstract
The electron diffusion lengths in liquid‐phase epitaxial (LPE) p‐GaAs:Ge layers were determined by using the electron‐beam‐induced current method. The electron diffusion length is found to reduce gradually as the doping level of the epitaxial layer is increased. For four LPE p‐GaAs:Ge layers with carrier concentration of 1.4×1016 cm−3, 2.0×1017 cm−3, 1.3×1018 cm−3, and 2.5×1019 cm−3, the electron diffusion lengths were determined to be 8.1, 6.7, 5.1, and 1.2 μm, respectively.