Cubic boron nitride films prepared by reactive r.f. and d.c. sputtering from different boron containing targets
- 31 October 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 717-722
- https://doi.org/10.1016/0257-8972(95)08312-x
Abstract
No abstract availableKeywords
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