Germanium selenide as a negative inorganic resist for ion beam microfabrication
- 28 February 1983
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 14 (1) , 35-42
- https://doi.org/10.1016/s0026-2692(83)80167-0
Abstract
No abstract availableKeywords
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